Estimation and Control in Semiconductor Manufacturing:

	Visions for Quantitative Biology Lecture Series
	Estimation and Control in Semiconductor Manufacturing:
	Dr. Pramod P. Khargonekar
	Dean, College of Engineering University of Florida
	CEBA 1109 April 21, 2004 - 12:00 am
Abstract: In this talk, Dr. Khargonekar will begin with an overview of semiconductor manufacturing. This technology has been a cornerstone of modern information technology revolution as captured in the very well known Moore's Law. In this context, he will describe the establishment and work of a multi-disciplinary research team at the University of Michigan that was focused on control of the plasma etching process. He will present some selected results on estimation and in-situ real-time control of plasma etching process. The talk will conclude with some observations on rewards and challenges of multi-disciplinary research.

Speaker's Bio: Dr. Pramod P. Khargonekar is the Dean of College of Engineering at the University of Florida. He received his B. Tech. degree in electrical engineering from the Indian Institute of Technology, Bombay in 1977, and his M.S. degree in mathematics and Ph.D. degree in electrical engineering from the University of Floriday in 1980 and 1981, respectively. After holding faculty positions at the Unveristy of Florida and University of Minnesota, he joined The Universityof Michigan in 1989 where he last held the positions of Claude E. Shannon Professor of Engineering Science and chariman and Professor of Electrical Engineering and Computer Science. Dr. Khargonekar is a receipient of the NSF Presidential Young Investigator Award (1985), the American Automatic Control Council's Donald Eckman Award (1989), the IEEE W.R.G. Baker Prize Award (1991), the George Axelby Best Paper Award (1990), the Hugo Schuck ACC Best Paper Award (1993), the Japan Society for Promotion of Science Fellowship (1992), and a Distinguished Alumnus Award from the Indian Institute of Technology, Bombay (1997). At the University of Michigan, he received a research excellence award from the College of Engineering in 1994, and the Arthur F. Thurnau Professorship from 1995 to 1998. He is a Fellow of IEEE.


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